SCANNING DEVICE FOR LOCAL EXPOSURE Russian patent published in 2017 - IPC G01Q60/00 G01N23/00 B82Y35/00 

FIELD: physics.

SUBSTANCE: local impact scanner includes a sample (1) with a first (2) and a second surface (3), a probe (4) with a point (5) fixed in the probe module (7), a scanner (8), a first travel module (9) and the control unit (10). The scanner (8) and the first travel module (9) are mounted on the platform (11). The probe (4) is arranged for the relative scanning of the point (5) and the first surface (2) of the sample (1). The control unit (10) is adapted to scan the surface (2) with the tip (5). The probe (4) includes the radiation module (6). Also, the device is provided with a second travel module (13) and a punch (14) mounted on the third travel module (15) and a radiation sensor (19) mounted on the side of the second surface (3) of the sample (1) with the radiation module (6). The sample (1) is mounted on a scanner (8) fixed to the second travel module (13) located on the platform (11). The probe module (7) with the probe (4) is mounted on the first travel module (9) located on the platform (11). The punch (14) with the third travel module 15 is mounted on the platform (11) with the possibility of interaction with the sample (1).

EFFECT: increase the depth of influence on the sample, expand the range of effects.

5 cl, 4 dwg