METHOD FOR PREPARATION OF SURFACE IN BINARY AND MULTICOMPONENT MATERIALS Russian patent published in 2010 - IPC H01L21/42 B82B3/00 

FIELD: electric engineering.

SUBSTANCE: invention may be applied in technology of micro- and nanoelectronics to produce atomic-smooth surfaces and perfect epitaxial structures on disoriented surfaces of specimens. In method of binary and multicomponent materials surface preparation, a working layer having thickness of 1÷150 mcm is applied onto prepared surface of specimen, and it includes at least one component, where at least one of components in liquid phase condition dissolves specimen material. Besides, components of working layer are selected with such temperature expansion ratios, which do not result in specimen damage during technological process, and which are also easily removed from sample surface and do not leave hard-to-remove sludge, specimen is heated in vacuum at the pressure of not more than 5·10^-3 Pa to the temperature of (0.8·Tp±50)°C, (Tp - temperature of specimen material plasticity), maintained for 2-5 minutes and processed with sheet-like paraxial power beam at specific capacity of (1.0 - 20.0)·10⁴ W/cm², speed of 5-100 cm/s, cooled down to room temperature, and working layer is removed from specimen surface.

EFFECT: invention provides for production of atomic-smooth and structured surfaces, reduced duration of technological treatment process.

4 cl, 4 dwg, 2 tbl