METHOD FOR FORMATION OF TRIBOLOGICAL COATING Russian patent published in 2020 - IPC B32B5/14 C01B32/25 C23C14/08 C23C14/16 C23C14/35 

FIELD: machine building.

SUBSTANCE: invention can be used in machine building and micromechanics to reduce friction and wear in friction bearings. First, working surface of articles 1 is prepared by polishing, degreasing in an ultrasonic bath, treatment with a petrol-alcohol mixture and thermal treatment in a drying cabinet. Prepared articles 1 are placed in vacuum chamber 2, insulated from its housing and connected to pulse negative voltage source (bias voltage). Simultaneously with evacuation of vacuum chamber 2 it is heated by heaters 5 for intensification of degassing process. After supply of plasma-forming gas - argon into vacuum chamber 2, metal surface of articles 1 is subjected to ion etching, for this purpose magnetron 4 is switched on. Then nitrogen is added and simultaneous nitriding at heating of articles 1 surface is performed up to 200÷500 °C. Then, surface of articles 1 is coated with transition layer of at least one layer of metal, metal carbide or metal nitride at varying negative bias voltage and flow of reaction gas, the flow rate of which is increased simultaneously with reduction of bias voltage. After formation of transition layer, magnetron 4 is switched off, negative voltage is supplied to articles 1 and magnetron 3 is applied to apply main coating layer by means of high-power pulse magnetron sputtering after heating of target from Al_0.75Mg_0.75B₁₄.

EFFECT: higher quality and service life of coating due to increased allowable contact loads and reduced coefficient of friction.

1 cl, 2 dwg