FIELD: measurement equipment.
SUBSTANCE: invention relates to measurement equipment, in particular - to equipment for measurement of thermal parametres of semi-conductor devices after fabrication. The device contains a terminal block, two comparison devices, a reference voltage source, a selector, a clock pulse generator, a power supply, a counter, a heater, a fan, a thermometre, a vessel with dielectric liquid, an amplifier, a switcher, a voltmetre and a current source.
EFFECT: improved precision and universality of measurement of heat resistance transition-housing of a semi-conductor device as well as decrease of the risk of breakdown of the semi-conductor device controlled.
4 dwg
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