METHOD FOR DETERMINATION OF HEAT-TRANSFER RESISTANCE FOR DIGITAL CMOS INTEGRATED CIRCUITS Russian patent published in 2014 - IPC G01R31/28 

FIELD: electricity.

SUBSTANCE: to inputs of one or several logic units of the controlled integrated circuit a sequence of high frequency switching and heating pulses is delivered with frequency F_heat; such pulses are modulated by sequence of rectangular video pulses with permanent pulse repetition period T_rep, which length τ_P is variable according to harmonic law with frequency Ω_M. At modulation frequency Ω_M the following parameters are defined and measured: amplitude of the first harmonic for the current consumed by the controlled integrated circuit; amplitude of the first harmonic of heat-sensitive parameter - output voltage of the logic unit with stable state and phase shift φ(Ω_M) between the first harmonic of the current consumed by the controlled integrated circuit and the first harmonic of heat-sensitive parameter. Module and phase of heat-transfer resistance are defined for the controlled integrated circuit at frequency Ω_M against measured values.

EFFECT: higher accuracy of measurement.

2 cl, 2 dwg