METHOD FOR STABILISATION OF ELASTIC ELEMENT IN PRESSURE SENSOR WITH PRESSURISED RESISTIVE-STRAIN GAGES Russian patent published in 2010 - IPC G01L7/02 

FIELD: electricity.

SUBSTANCE: method for stabilisation of elastic element in pressure sensor with resistance strain gages consists in thermal stabilization of elastic element with simultaneous cyclic heating of resistance strain gages to temperatures that provide for their high-temperature annealing, and in monitoring of output signal by speed of change in values of initial output signal at the temperature of 80°C. Initial output signal U₀ is measured under normal conditions at working voltage of supply. Elastic element is placed into drying cabinet at the temperature of 80°C with simultaneous supply of higher supply voltage to the circuit. In an hour working supply voltage is established. Elastic element is maintained for five minutes, initial output signal U_oti is measured. Another four such cycles are carried out, elastic element is cooled down for one hour. Initial output signal is measured again at working voltage of supply, and unstable resistance strain gages are rejected. Speed of measurement of initial output signal is detected according to appropriate formula. Thermal stabilisation is carried out at the temperature of 50°C with simultaneous exposure of membrane to higher pressure.

EFFECT: improved quality and reliability of elastic element in pressure sensor, higher stability of initial output signal of elastic element in pressure sensor and detection of hidden defects in thin-film heterostructure at early stages of manufacturing of elastic element of pressure sensor.

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