METHOD OF STABILIZATION OF ELASTIC ELEMENT OF PRESSURE SENSOR WITH TENSORESISTORS Russian patent published in 2015 - IPC G01L7/02 

FIELD: electricity.

SUBSTANCE: method of stabilization of the elastic element of pressure sensor with tensoresistors consists in thermostabilization of the elastic element with cyclic heating of tensoresistors. High-temperature annealing is performed in vacuum to three cycles up to the temperature 350±10°C, with holding on its achievement within 30 minutes with the subsequent decrease of the temperature down to 100±10°C after each cycle, then the thermostabilization in air is performed at the temperature 250±10°C with subsequent monitoring of change (drift) of rated values of resistance of tensoresistors for rejection of potentially defective elements. Thermostabilization in vacuum and in air is performed at the stage of formation of the circuit of the sensitive element with impact on the whole structure of the elastic element of pressure sensor.

EFFECT: improvement of stability and reliability of the elastic element of pressure sensor, providing of high accuracy of pressure measurement within long time of their operation.

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