METHOD TO STABILISE THIN-FILM NANO-AND MICROELECTRO-MECHANICAL SYSTEM OF RESISTANCE STRAIN GAUGE PRESSURE SENSOR Russian patent published in 2013 - IPC G01L27/00 B82B1/00 

FIELD: instrument making.

SUBSTANCE: heating of resistance strain gauges by pulse electric current is carried out after sealing of the inner cavity of the sensor system with simultaneous action at its receiving pressure cavity, exceeding the maximum permissible overload pressure 1.05 times, and minimum permissible lower temperature during operation, and also pressure that exceeds maximum permissible overload pressure 1.05 times and higher temperature exceeding 1.05 times the maximum permissible higher temperature during operation. Thermal stabilisation is carried out at the temperature that exceeds 1.05 times the maximum permissible higher temperature during operation. Measurements of initial output signals during thermal stabilisation are carried out under higher supply voltage. Control of initial output signal variation speed is carried out by ratios of speed of variation of given values of initial output signals in the last and last but one measurement of the initial output signal during thermal stabilisation.

EFFECT: higher stability of an initial and a nominal output signal of sensors, detection of hidden defects of resistance strain gauges at early stages of manufacturing.