FIELD: electricity.
SUBSTANCE: method of fabricating thin-film resistors includes sequential sputtering of resistive and conductive films onto the dielectric substrate, formation of resistors micropattern by photolithographic technique with subsequent high-temperature processing by infrared radiation at temperature of resistive film crystallisation. High-temperature processing is carried out in the short run in vacuum during 15-30 minutes, thereupon temperature stabilisation in air is carried out at temperature of 220±30°C during 15-35 minutes. High-temperature processing in vacuum is performed at pressure P = (1·10-5-5·10-6) mm hg.
EFFECT: improved stability of the resistive component, expanded range of operating temperature for the sensor during operation and high measurement accuracy of pressure sensor during long time of its operation.
2 cl, 1 tbl
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF STABILIZATION OF ELASTIC ELEMENT OF PRESSURE SENSOR WITH TENSORESISTORS | 2014 |
|
RU2566538C1 |
| METHOD OF MANUFACTURING OF THIN FILM NANO- AND MICROELECTROMECHANICAL SYSTEM OF MECHANICAL VALUES TRANSMITTER | 2013 |
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| METHOD TO MANUFACTURE THIN-FILM NANO AND MICROELECTROMECHANICAL SYSTEM OF HIGH TEMPERATURE SENSOR OF MECHANICAL VALUES | 2014 |
|
RU2547291C1 |
| MANUFACTURING METHOD OF NANO- AND MICRO-SIZED SYSTEM OF SENSOR OF PHYSICAL VALUES WITH SPECIFIED POSITIVE TEMPERATURE COEFFICIENT OF RESISTANCE OF RESISTIVE ELEMENTS | 2014 |
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| METHOD OF MANUFACTURING OF HEAT-RESISTANT NANO AND MICROELECTROMECHANICAL SYSTEM OF MECHANICAL VALUE TRANSMITTER | 2014 |
|
RU2548380C1 |
| METHOD OF MAKING THIN-FILM PRECISION RESISTOR | 2022 |
|
RU2818204C1 |
| MATERIAL FOR MANUFACTURING THIN-FILM RESISTORS AND METHOD FOR PRODUCING RESISTIVE FILM AROUND IT | 2006 |
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RU2323497C1 |
| CHIP RESISTOR MANUFACTURING METHOD | 2014 |
|
RU2552630C1 |
| METHOD FOR PRODUCING HIGH-TEMPERATURE THIN-FILMED RESISTANCE STRAIN GAUGE | 0 |
|
SU1820416A1 |
| METHOD FOR STABILISATION OF ELASTIC ELEMENT IN PRESSURE SENSOR WITH PRESSURISED RESISTIVE-STRAIN GAGES | 2009 |
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RU2399894C1 |
