MICROMECHANICAL GYROSCOPE Russian patent published in 2010 - IPC G01C19/56 

FIELD: physics.

SUBSTANCE: gyroscope has a dielectric substrate, support elements mounted on the substrate on opposite sides, a frame mounted with clearance from the substrate and joined to the support elements through elastic jumpers, an inertial mass placed with clearance from the substrate and joined to the frame through elastic members, a frame inside the inertial mass with clearance from the substrate and joined to the inertial mass through extra elastic jumpers, an oscillation exciting system consisting of fixed electrodes mounted on the substrate, and movable electrodes made in the frame, a system for capacitive pickup of output oscillations consisting of fixed electrodes mounted on the substrate and movable electrodes made in the inertial mass. The resonance frequency of oscillations of the frame is less than the resonance frequency of oscillations of the inertial mass.

EFFECT: invention increases accuracy of measuring angular velocity and increases reliability of the device.

2 cl, 3 dwg