MICRO-OPTOELECTROMECHANICAL ANGULAR VELOCITY SENSOR Russian patent published in 2023 - IPC G01C19/56 

FIELD: velocity sensors.

SUBSTANCE: microptoelectromechanical angular velocity sensor is designed to measure the angular velocity of moving objects and can be used, for example, in control systems of aircraft, ships, cars, and others. The proposed sensor includes a substrate made of a dielectric material, a frame located with a gap relative to the substrate, connected to the support elements, and an inertial mass located with a gap relative to the substrate and connected to the frame through elastic elements. The vibration excitation system consists of fixed electrodes fixed on the substrate and movable electrodes fixed on the outer side of the frame, an information retrieval system consisting of two optical reading units, an optical radiation source, photodetectors, an optical modulator made in the form of two total internal reflection prisms , the reflection surfaces of which are located at an angle of 90º to each other, and a wedge-shaped optical element fixed on the outer side of the frame opposite the total internal reflection prisms. The size of the symmetrical gaps between the reflecting surfaces of the total internal reflection prisms and the edges of the wedge-shaped optical element is uniform and does not exceed the wavelength of the optical radiation source. Each wedge-shaped optical element has a silicon dioxide coating on its surface, and each total internal reflection prism is made of planar silicon dioxide technology.

EFFECT: increased noise immunity and sensitivity.

3 cl, 3 dwg