INTEGRAL MICROMECHANICAL GYROSCOPE Russian patent published in 2009 - IPC G01C19/56 G01P9/04 

FIELD: physics.

SUBSTANCE: gyroscope comprises dielectric substrate, where base is fixed, as well as immovable comb-shaped structures in the form of electrostatic vibratory drive plates. Rectangular external frame is fixed in the base by means of four elastic beams. On external frame on both opposite sides there are electrodes of capacitance transducers of internal frame motion relative to external frame fixed, as well as movable comb-shaped structures in the form of electrostatic vibratory drive plates, which are arranged with the possibility of electrostatic interaction with movable plates of vibratory drive via side gaps due to comb-shaped structures of electrostatic vibratory drive that penetrate one into another. Internal rectangular frame is fixed in base by means of four elastic beams. On external frame on both opposite sides there are electrodes of capacitance transducers of internal frame motion relative to external frame fixed, as well as two electrodes of capacitance transducers of inertial mass motion relative to internal frame. Inertial mass arranged in the form of plate, on which on two opposite sides there are electrodes of capacitance transducers of its motion relative to internal frame fixed, is mounted in internal frame with the help of four elastic beams that provide for possibility to make forward oscillations along axis installed in plane of substrate. Inertial mass, internal frame, external frame and elastic beams are made of semiconductor material and are installed with gap relative to substrate.

EFFECT: provision of possibility to measure angular velocity value around axes X and Y installed as mutually perpendicular in plane of gyroscope substrate.

2 cl, 1 dwg