COMPENSATING MICRO-OPTOELECTROMECHANICAL ANGULAR VELOCITY SENSOR Russian patent published in 2023 - IPC G01C19/56 G01P3/44 

FIELD: velocity sensor.

SUBSTANCE: intended for measuring the angular velocity of moving objects and used in control systems of aircraft, ships and cars. The angular velocity sensor is equipped with a system for compensating for low-frequency frame displacement. The processing unit contains two adders, the inputs of the first adder are connected to the outputs of photodetectors of the first optical reading unit. The inputs of the second adder are connected to the outputs of the photodetectors of the second optical reading unit. The output of the first adder is connected to the summation input of the subtracting device, and the output of the second adder is connected to the subtracting input of the subtracting device, while the output of the subtracting device is connected to the input of a bandpass filter having a bandwidth equal to the natural frequency of the frame oscillations. The filter output is connected to the input of a synchronous demodulator, the output of which is connected to the input of the first low-pass filter, while the output of the subtracting device is connected to the input of the second low-pass filter, the output of which is connected to the input of the proportional-integrating regulator, the output of which is connected to the low-frequency frame shift compensation system, made in the form of fixed electrodes mounted on the substrate opposite the sides of the frame with optical reading units, and movable electrodes mounted on the outside of the frame on the sides of each wedge-shaped optical element.

EFFECT: increasing diagnostic accuracy.

1 cl, 4 dwg