PRESSURE-SENSITIVE ELEMENT Russian patent published in 2010 - IPC G01L9/08 

FIELD: physics.

SUBSTANCE: pressure-sensitive element has a membrane with a recess, rigidly attached to a base through a lining with formation of a sealed evacuated cavity between the membrane and the base, inside of which a piezoelectric element is rigidly attached by its ends over the recess. The ratio of geometrical dimensions of the diametre of the recess in the membrane to the inner diametre of the lining is less than or equal to 0.5. The piezoelectric element is made from a surface acoustic wave (SAW) structure and can be longitudinally compressed and stretched. Crystallographic axes of the membrane, lining, base and said piezoelectric element are in the same direction. Contacts of the said piezoelectric element come outside from the evacuated cavity through high-frequency electrodes deposited on the membrane, where the said electrodes are matched with an antenna in the response frequency band of the SAW structure.

EFFECT: increased sensitivity of the SAW structure in the primary detecting element.

6 dwg