METHOD OF OBTAINING CARBON LAYER ON NON-CONDUCTING SUBSTRATE Russian patent published in 2010 - IPC C01B31/04 B82B3/00 

FIELD: chemistry.

SUBSTANCE: method relates to nanotechnology of layered materials and is meant for obtaining nanosized carbon layers on non-conducting substrates for mass production of devices using planar technology. The method of obtaining a carbon layer on a non-conducting substrate involves oxidation of a graphite substrate through fluorination under conditions which provide dielectric properties of the substrate. An intercalation compound based on graphite fluoride C₂F_X with x≤1 is obtained, wherein the introduced component can be substituted. Fluorine-oxidising agent is used: BrF₃ vapour or BrF₃ solution to Br₂. Fluorine atoms are then removed from the surface layer of the required thickness of 1-4 nm under conditions which facilitate formation of a carbon layer of controlled thickness on the dielectric substrate. Defluorination is carried out via chemical reduction in water vapour or hydrasine hydrate vapour or through exposure to ionising particles - electron beam. Due to the purely chemical and/or radiation-chemical nature of the main operations, as well as initiation of formation of the carbon layer during defluorination from the surface with distribution deep into the substrate, with achievement of the required thickness of the formed carbon layer through chemical reduction conditions - concentration and temperature of the vapour of reagents and in case of reduction with an electron beam - kinetic energy of electrons, increase in the area of the solid carbon layer and possibility of controlling its thickness are achieved.

EFFECT: increased area of the solid carbon layer and possibility of controlling its thickness.

11 cl, 4 dwg, 5 ex