FIELD: process engineering.
SUBSTANCE: invention can be used in medicine, namely, in shell of micro capsule intended for precise delivery of medicines. Zinc target is sprayed in magnetron DC spraying system, said target making cathode in magnetic field to provide coming of zinc atoms from spraying zone into plasma upflow. To form said flow, vertical component of magnetic field induction at target spraying zone outer edge exceeds that at inner zone by at least 10%. Annular anode is arranged above metal target. Anode-cathode system is arranged in vacuum chamber in atmosphere of oxygen or argon-oxygen mix wherein ratio between partial pressures of argon and oxygen varies from 50% : 50% to 1 % : 99 %. Horizontal component of magnetic field above target spraying zone makes at least 500 F. Gas mix pressure does not exceed 10-1 Pa. Anode voltage relative to target makes at least 400 V.
EFFECT: production of zinc oxide polycrystalline nanoparticles.
1 dwg
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