MICROELECTROMECHANICAL SWITCH Russian patent published in 2010 - IPC B81B7/02 

FIELD: physics, radio.

SUBSTANCE: invention relates to microwave engineering and can be used in radio systems, for example in tunable radar systems. The microelectromechanical (MEM) switch has a substrate 1, made from dielectric or semiconductor material, on which there is a control electrode 2, a high frequency electrode 3 and one end of a mobile electrode 4, whose mobile part lies parallel to the surface of the control electrode 2 with a gap in between. The MEM switch also has a flexible plate 5 lying between the mobile electrode 4 and the substrate 1 and is attached on the substrate 1 by one end. The shape and dimensions of the flexible plate 5 leave the surface of the control electrode 2 and the high frequency electrode 3 open, and under the free end of the flexible plate 5 there is a depression 6 in the substrate 1 for moving the flexible plate 5. In the flexible plate 5 there are recesses whose dimensions are greater than dimensions of the control electrode 2 and the high frequency electrode 3, respectively. The length of the mobile part of the flexible plate 5 is shorter than the length of the cavity to the control electrode 2.

EFFECT: lower control voltage and faster operation of the MEM switch.

4 dwg, 3 cl