FIELD: electricity.
SUBSTANCE: electrostatic microelectromechanical key comprises silicone crystal with formed movable electrode shaped as console with symmetrical slotted openings in it thus forming flexible supporting beams of different length perpendicular to each other and substrate with at least one fixed electrode and current busbars, which is connected to silicone crystal with a gap between movable and fixed electrodes; at that the movable electrode is equipped with shunt short-circuiting current bus bars at contact and off-set in regard to the centre towards free edge of the movable electrode.
EFFECT: reduced control voltage of MEMS key and increased maximum permitted commutation current.
2 cl, 3 dwg
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