HOLDER FOR GROUP TRANSPORTATION OF SEMICONDUCTOR PLATES Russian patent published in 2011 - IPC H01L21/677 

FIELD: physics.

SUBSTANCE: holder for group transportation of semiconductor plates is made from four fluoroplastic rods. Two lateral rods are placed on the sides of the semiconductor plates in the holder and one bottom rod, which acts as the bottom of the holder, is placed below the semiconductor plates in the holder. The lateral rods are placed such that their longitudinal axes and centres of the plates being treated in the holder lie in one plane. Grooves in the rods are merged to ensure that the treated plates lie in the vertical plane, perpendicular the longitudinal axes of the rods. Grooves in both lateral rods have a flat-topped cross section. Attachment devices from the ends of the rods enable attachment of a fourth rod which acts as the cover after putting the semiconductor plates into the holder. The fourth rod also has grooves which are merged with grooves in the lateral and bottom rods. The shape of the grooves in the fourth rod is a mirror reflection of the shape of the grooves in the bottom rod in order to hold the plates during transportation.

EFFECT: invention prevents loss of plates during transportation by preventing sticking of plates in the grooves after high-temperature operations and when reloading the plates.