CASSETTE FOR LIQUID TREATMENT OF SEMICONDUCTOR WAFERS Russian patent published in 2011 - IPC H01L21/306 

FIELD: physics.

SUBSTANCE: cassette for liquid treatment of semiconductor wafers has four cylindrical rods whose butt-ends are attached to the cassette and have grooves. Longitudinal axes of the rods are parallel to each other. The top rod acts as the cover and its opposite butt-ends can be fastened after putting semiconductor wafers into the cassette. The bottom rod acts as the bottom of the cassette. Grooves in all rods are aligned such that they enable placing each treated wafer in the vertical plane, perpendicular to longitudinal axes of the rods, wherein grooves in both lateral rods have a flat-topped cross-section. The rods are made from fluoroplastic. The depth of grooves in all rods is half the diameter of the rods. The rods are placed such that the transverse plane of their cross-section is perpendicular to their longitudinal axes, and the cross-section of each rod has the shape of a circle. The diameter of the cylindrical rods is equal to 0.8-1.2 cm. Lateral rods and the bottom rod are placed relative each other and the semiconductor wafers such that the centre of each circle in the plane of the cross-section of the rods lies at the corners of a regular pentagon inscribed in the circle, the diameter of which is equal to the diameter of the semiconductor wafers, wherein said corners lie in the bottom half of the circle.

EFFECT: invention enables to prevent loss of wafers during treatment.