CASSETTE FOR GROUP TRANSPORTATION OF SEMICONDUCTOR PLATES Russian patent published in 2013 - IPC H01L21/677 

FIELD: electrical engineering.

SUBSTANCE: cassette for group transportation of semiconductor plates contains four fluoroplastic rods with slots and two fixtures at the rods butt-ends; each of the four rods represents a fluoroplastic tube with a dense rubber insert along the whole of the tube length. The tube wall thickness is equal to (30-40)% of the slots depth the is identical for all the slots; the two side rods are positioned on the sides of the semiconductor plates as may be placed inside the cassette. One lower rod, playing the role of the cassette bottom, is positioned below the semiconductor plates as may be placed inside the cassette. The cross-section of the slots in the side rods is "П"-shaped. The side rods width exceeds the plate thickness by 30-50%. The cross-section of the slots in the lower rod is shaped as an upturned equilateral trapezium so that the trapezium upper (major) base is less than the semiconductor plate thickness by (100-120)% while the trapezium lower (minor) base exceeds the plate thickness by (30-50)%. The fourth rod also has slots, their shape representing mirror reflection of that of the slots made in the lower rod. The slots in the fluoroplastic tube and the rubber insert of each rod are made simultaneously in the course of a single cutting operation.

EFFECT: invention enables exclusion of plates losses during transportation operations due to exclusion of plates sticking in the slots with simultaneous acceleration of movements as may be carried out and handling freedom enhancement.