FIELD: physics.
SUBSTANCE: invention relates to a miniature spring element suitable for use as a beam-type probe or cantilever (2) for determining atomic or molecular forces, particularly in a focused-beam microscope (22) for atomic forces. The miniature spring element (1, 1') has a flexible main body (4) which is formed from a matrix with embedded nanoparticles (14) or defects. The spring element (1, 1') is made based on the principle of local deposition using focused energetic particles or electromagnetic waves or using pyrolytically induced deposition.
EFFECT: reliable and high-resolution determination of deviation of the beam-type probe.
15 cl, 6 dwg
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