FIELD: chemistry.
SUBSTANCE: invention discloses a method of making an electrochemical sensor with a detector area, electrical conductivity (σ) of which is set via tunnelling, ionisation or hopping processes, and in which electrochemical interaction with a defined substance is established; wherein the detector area is made by local application of energy, preferably by electron beam-induced deposition, wherein gaseous precursor substances present in the deposition area in immediate proximity to the substrate are energy-activated for conversion, wherein the conversion products are deposited in solid and nonvolatile form on the substrate. Also disclosed is an electrochemical sensor made using the described method.
EFFECT: enabling reliable and highly accurate detection of trace amounts or concentrations of a given chemical substance.
16 cl, 5 dwg
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Authors
Dates
2013-12-27—Published
2009-10-22—Filed