FIELD: instrument making.
SUBSTANCE: method to manufacture a microinstrument includes procedures, in which the structure of the instrument or its parts are formed in one material, and then this material is transformed (converted) into another material by means of chemical or structural transformation. For instance, a method is proposed to manufacture microinstruments on the basis of silicon carbide by means of instruments development in silicon and further conversion of silicon into silicon carbide.
EFFECT: simplification and cheapening of the method to manufacture a microinstrument on the basis of materials, which are hard to process.
15 cl
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Authors
Dates
2011-07-27—Published
2009-12-31—Filed