METHOD TO MANUFACTURE MICROINSTRUMENT Russian patent published in 2011 - IPC H01L21/00 

Abstract RU 2425430 C2

FIELD: instrument making.

SUBSTANCE: method to manufacture a microinstrument includes procedures, in which the structure of the instrument or its parts are formed in one material, and then this material is transformed (converted) into another material by means of chemical or structural transformation. For instance, a method is proposed to manufacture microinstruments on the basis of silicon carbide by means of instruments development in silicon and further conversion of silicon into silicon carbide.

EFFECT: simplification and cheapening of the method to manufacture a microinstrument on the basis of materials, which are hard to process.

15 cl

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Authors

Abduev Aslan Khadzhimuratovich

Abduev Marat Khadzhi-Muratovich

Asvarov Abil Shamsudinovich

Akhmedov Akhmed Kadievich

Bilalov Bilal Arugovich

Safaraliev Gadzhimet Kerimovich

Dates

2011-07-27Published

2009-12-31Filed