FIELD: mechanics.
SUBSTANCE: proposed plant comprises a vacuum chamber, carriage with rotation mechanism, heater with a substrate, ion gun, crystal growth control systems and those to produce and maintain ultrahigh vacuum. Note that it additionally comprises a device arranged aligned with the said ion gun and heater with substrate and incorporating a fixed screen with one hole, separator with one hole running on the axle linked up with its rotation mechanism, as well as tapered detachable target holder with lengthwise slot and with its inner surface supporting the targets fixed thereto. Fixed tapered screen with lengthwise slot and one hole is arranged coaxially with the target holder, the screen inner surface being provided with a replaceable gasket. Note that the holes in the screen, target holder and mask are arranged at equal distance from the axis of rotation of separator.
EFFECT: perfected design of device to produce multi-layered structures using ion gun.
3 dwg
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