FIELD: process engineering.
SUBSTANCE: proposed method comprises placing plate to be polished in etching chemical solution. Note here that said plate is secured to vacuum holder by plate non-working side while plate working side in downed into said solution. Said plate is rotated about its axis and, simultaneously, moved regularly along the circuit.
EFFECT: uniform polishing.
5 dwg, 3 ex
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Authors
Dates
2012-04-10—Published
2010-04-19—Filed