METHOD OF CHEMICAL DYNAMIC POLISHING Russian patent published in 2012 - IPC C23F3/00 H01L21/304 

Abstract RU 2447196 C2

FIELD: process engineering.

SUBSTANCE: proposed method comprises placing plate to be polished in etching chemical solution. Note here that said plate is secured to vacuum holder by plate non-working side while plate working side in downed into said solution. Said plate is rotated about its axis and, simultaneously, moved regularly along the circuit.

EFFECT: uniform polishing.

5 dwg, 3 ex

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RU 2 447 196 C2

Authors

Krasnikov Gennadij Jakovlevich

Tadevosjan Samvel Grantovich

Ranchin Sergej Olegovich

Sukhorukov Dmitrij Olegovich

Dates

2012-04-10Published

2010-04-19Filed