POLISHING ETCHANT COMPOSITION FOR CHEMICAL-MECHANICAL POLISHING OF CADMIUM-ZINC TELLURIDE Russian patent published in 2017 - IPC C23F1/30 H01L21/306 

Abstract RU 2627711 C1

FIELD: chemistry.

SUBSTANCE: composition includes sulfuric acid, hydrogen peroxide, water, ethylene glycol and glycerin, with the following ratio of components, volume fractions: sulfuric acid (98%) - 7, hydrogen peroxide (30%) - 1, water - 1, ethylene glycol - 3,5, glycerol - 3.5.

EFFECT: invention provides polishing etching of cadmium-zinc telluride with the formation of a homogeneous surface with an average roughness of not more than 7 nm.

3 dwg

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RU 2 627 711 C1

Authors

Lakmanova Medina Refatovna

Kashuba Aleksej Sergeevich

Pogozheva Anna Vladimirovna

Dates

2017-08-10Published

2016-11-02Filed