FIELD: technological processes.
SUBSTANCE: invention relates to the field of technology associated with the production of plasma from a gaseous medium under electron cyclotron resonance conditions. Method for creating a plasma for performing a surface treatment or coating around a whisker component includes performing a continuous rectilinear movement of the threadlike component through at least two magnetic dipoles located opposite each other and around the pipe forming the processing chamber, and the introduction of microwave energy between at least two magnetic dipoles.
EFFECT: providing the possibility of generating a plasma localized around the filamentary component to minimize the chamber volume and the consumed source gas and energy to produce an axisymmetric plasma in order to ensure uniformity of the workpiece processing by the method of plasma-chemical vapor deposition.
13 cl, 5 dwg
