DISPLACEMENT SENSOR Russian patent published in 2012 - IPC G01B21/02 H01L23/34 

FIELD: physics.

SUBSTANCE: silicon monocrystalline microheater is used as a displacement sensor and the value of heat lost from the microheater to a heat receiver serves as the measuring signal. The microheater has the shape of a variable section beam, the wide part of which is a resistor and has a region of opposite conduction type, and the narrow part is form of current leads having low-resistivity silicon regions and a silicide coating, wherein the end of the current leads is in form of a platform for forming metal contacts. Displacements vary from 5 to 800 mcm and measurement accuracy is equal to ±20 nm.

EFFECT: high accuracy and stability of sensor readings.

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