FIELD: instrumentation engineering; instruments where higher-than- ambient temperature should be maintained. SUBSTANCE: microscopic heater has resistor, current leads, and metal contact pads. Resistor and current leads are made of single-crystalline silicon foil. Microscopic heater is made in the form of variable-section strip whose wide section functions as resistor and narrow one, as current leads wherein low-resistance silicon regions are formed and silicide coating is provided. Current-lead terminating ends are made in the form of pads carrying metal contacts. Heater resistance as function of temperature is of extreme character. EFFECT: reduced smearing, enlarged temperature range. 2 dwg
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