FIELD: physics.
SUBSTANCE: constant focused state of an electron beam is achieved by measuring temperature inside the electron gun and achieving temperature feedback based on outlet velocity of the vacuum outlet system in order to control pressure inside the electron gun.
EFFECT: possibility of eliminating any space charge effect, as well as the neutralising effect of space charge inside the electron gun to achieve full control of the electron beam.
16 cl, 15 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| VACUUM PROCESSING DEVICE | 2007 |
|
RU2421543C2 |
| GAS-DISCHARGE ELECTRON GUN CONTROLLED BY AN ION SOURCE WITH CLOSED ELECTRON DRIFT | 2022 |
|
RU2792344C1 |
| ELECTRON BEAM GUN | 2012 |
|
RU2518502C1 |
| ELECTRON GUN BEAM POWER CONTROL DEVICE | 2006 |
|
RU2311700C1 |
| CATHODE DEVICE, AN ELECTRON GUN AND A LITHOGRAPHY APPARATUS COMPRISING SUCH AN ELECTRON GUN | 2014 |
|
RU2689391C2 |
| ELECTRON GUN WITH FIELD-EMISSION CATHODE | 2019 |
|
RU2718693C1 |
| ELECTRON-BEAM INSTALLATION | 2000 |
|
RU2192687C2 |
| ELECTRON-BEAM GUN WITH INCREASED SERVICE LIFE | 2018 |
|
RU2709793C1 |
| AXIAL ELECTRON GUN | 2017 |
|
RU2699765C1 |
| ELECTRON WORK FUNCTION DETERMINATION DEVICE | 2024 |
|
RU2821217C1 |
