FIELD: process engineering.
SUBSTANCE: method relates to polymer materials, particularly, to making thin polymer films. Proposed method comprises condensation of vapors of parylen and its derivatives on substrate, said vapors being produced by pyrolysis of paracyclophane [2.2] and its derivatives. Said pyrolysis is conducted in inert gas flow at pressure exceeding barometric pressure. Used inert gas relative to monomer represents helium, neon, argon, xenon, krypton carbon dioxide, nitrogen, molecular hydrogen, xylene or toluene.
EFFECT: perfected process.
1 cl, 1 tbl
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