FIELD: physics.
SUBSTANCE: surface of a sample is scanned separately for two areas - the surface of the substrate and the surface of the structural element on the substrate, without remounting the sample. The image of the surface of the structural element is formed by subtracting constant inclination which is determined from the results of scanning the surface of the substrate.
EFFECT: method enables to establish the value of inclination of the surface of the structural element relative the surface of the substrate, which increases measurement accuracy.
4 dwg
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