METHOD OF OBJECT SURFACE RELIEF MEASUREMENT USING SCANNING PROBE MICROSCOPES Russian patent published in 2008 - IPC G01B7/34 G12B21/00 

FIELD: probe microscopy.

SUBSTANCE: method involves the first scanning of the object surface while recording the vertical scanner displacement signal and the signal of probe interaction with the object; the second scanning of the object surface in the reverse direction while recording the vertical scanner displacement signal and the signal of probe interaction with the object; subtraction of the vertical scanner displacement signal recorded during the reverse scanning from the vertical scanner displacement signal recorded during the forward scanning; subtraction of the signal of probe interaction with the object recorded during the reverse scanning from the signal of probe interaction with the object recorded during the forward scanning; determination of a factor for the multiplication of the difference of the vertical scanner displacement signals, in order to obtain, during its subsequent addition to the difference of the signals of probe interaction with the object, a value as close to constant as possible; multiplication of vertical scanner displacement signal recorded while scanning in one of the directions, by the resulting factor, and its addition to the signal of probe interaction with the object recorded while scanning in the same direction; the resulting signal is then used as a surface relief signal of the object under investigation.

EFFECT: enhanced method of object surface relief measurement.

5 cl, 5 dwg