FIELD: measurement.
SUBSTANCE: invention relates to measurement equipment and can be used for analysis of samples in probe modes. Scanning probe microscope with device for multi-probe sensor operation includes platform 1, specimen holder 2 with sample 3, installed on scanning device 4, coupled with approach unit 5 installed on platform 1, recording system 6, consisting of radiation source 7 and photodetector 8, multi-probe sensor of contour type 9, containing base 10 with flexible cantilevers 15, points 16, 17, conjugated with rotation drive 21, including piezoelectric module 22 connected to housing 31, as well as unit control 30. Rotary drive 21 is connected with platform 1 with the possibility of opening with it and oriented installation on it.
EFFECT: technical result consists in simplification of replacing multizonde sensors of contour type and samples.
4 cl, 4 dwg
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