VACUUM MATERIAL APPLICATION DEVICE Russian patent published in 2013 - IPC C23C14/00 

FIELD: machine building.

SUBSTANCE: invention refers to vacuum material application devices intended to be used, first of all, in electronic engineering. Vacuum material application device includes vacuum chamber, in which applied material evaporator, substrate holder, heater of substrate holder, movement mechanism of substrate holder and vacuum system are located. In addition, the above device includes vacuum rotation input of gland or bellows type and heat exchange system. The above vacuum rotation input is equipped on each of its ends with a coupling and fixed on wall of vacuum chamber, and end of vacuum rotation input, which is located in vacuum chamber, is connected to upper end of the corresponding coupling by means of heat-insulating rod, the length of which has been chosen based on heat insulation between vacuum rotation input, coupling and substrate holder. Heat exchange system is located inside vacuum chamber and fixed on its wall concentrically and coaxially to vacuum rotation input and made in the form of at least one screen. Substrate holder movement mechanism is made in the form of system of sliding bearings located on the shaft and installed in the bushing. Heat-insulating rod and screen of the heat exchange system are made from ceramic material 22XC or from alundum, or from steel X18H10T. Sliding bearings are made from material with hardness class of not less than 7 on Mohs scale.

EFFECT: improving reliability; simplifying and enlarging functional capabilities of vacuum material application device and improving the quality and reliability of applied materials.

3 cl, 1 dwg, 5 ex