FIELD: technological processes.
SUBSTANCE: device consists of support flange 1, in which there are concentric slots 4 for device turning relative to axis of vacuum chamber and installation of posts 6, by means of which substrate holder 7 is fixed. Substrate holder 7 is made in the form of a plate with lugs 9 in the form of half-discs. Along external radius of half-discs there are holes 10 for fastening posts 6. In substrate holder 7 plate bearing assembly 13 is installed. In bearing assembly 13 shaft 19 is installed, rotation of which is transmitted through flexible transmission (movable element) 20 from rotation drive 21. Bush 22 is secured to shaft 19 by means of quick-detachable retainers 23. Second substrate holder 24 with coated part 25 is attached to bush 22.
EFFECT: invention relates to devices for application of coatings in vacuum and enables to change location of coated part relative to source of sprayed or evaporated material with preservation of axial rotation of part – substrate.
1 cl, 4 dwg
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|
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| 0 |
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SU382772A1 |
