DIAMOND COATING AND METHOD OF ITS DEPOSITION Russian patent published in 2018 - IPC C30B29/04 C30B25/22 C30B25/10 C23C16/27 C23C16/46 C23C28/00 B81C1/00 C01B32/25 B82B3/00 B82Y30/00 B82Y40/00 

FIELD: technological processes.

SUBSTANCE: invention relates to a microcrystalline diamond coating intended for tribological applications in the field of micromechanics, as well as in optics. Micromechanical component includes a substrate having a surface with a diamond coating comprising at least one stack of a first nanocrystalline diamond layer with a grain size on the surface of less than 50 nm, and a second microcrystalline layer with a grain size on the surface of the order of 100 nm, the diamond layer most closely approximated to the substrate is a nanocrystalline, and the surface of the diamond, which is farthest from the substrate, is microcrystalline. Diamond coating is characterized by roughness R_a, smaller than 20 nm, grain size on its visible outer surface, less than 100 nm.

EFFECT: invention has improved mechanical properties throughout its thickness.

20 cl, 5 dwg