FIELD: chemistry.
SUBSTANCE: before heat treatment by sintering (S20), intermediate heat treatment (S10) is carried out with decomposition of a carbonate contained in the thin film to be heat treated by sintering (S20) for crystallising heat treatment. Intermediate heat treatment (S10) is carried out in an atmosphere with carbon dioxide concentration lower than or equal to 10 mln-1. The organometallic compound contains a b-diketone complex.
EFFECT: invention enables to obtain a film with a larger thickness at high current density and with good reproducibility.
5 cl, 9 dwg, 2 tbl
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Authors
Dates
2013-02-27—Published
2009-02-18—Filed