TEXTURED SUBSTRATE FOR EPITAXIAL FILM FORMATION AND METHOD FOR THEREOF MANUFACTURING Russian patent published in 2016 - IPC C30B29/22 C30B25/18 C30B19/12 B32B9/00 H01L31/36 H01L39/24 H01B12/06 B32B15/04 

Abstract RU 2575286 C1

FIELD: chemistry.

SUBSTANCE: textured substrate contains layer of textured metal on at least one side, which includes layer of copper, which has cubic texture, and layer of nickel, which is 100-20000 nm thick, formed on copper layer; layer of nickel has 1-30 nm thick nickel oxide layer, formed on its surface, with nickel layer additionally including palladium-containing area, formed of palladium-containing nickel, on the surface of separation with nickel oxide layer. Upper layer of textured substrate, i.e. nickel oxide layer, has surface roughness approximately 10 nm or lower. Ultra-thin nickel oxide layer produces improved impact on growth properties and adhesion of epitaxial film.

EFFECT: substrate has crystalline orientation, providing possibility to form high-quality epitaxial film on its surface.

11 cl, 4 tbl

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RU 2 575 286 C1

Authors

Kasima Naodzi

Vatanabe Tomonori

Nagaja Sigeo

Sima Kunikhiro

Kubota Suiti

Dates

2016-02-20Published

2013-03-21Filed