CARBON NANO-TUBES BASED INTEGRAL MICRO-MECHANICAL GYROSCOPE Russian patent published in 2007 - IPC G01C19/56 G01P9/04 

FIELD: measuring technique; integral members for measuring angular speed.

SUBSTANCE: when semiconductor substrate l begins to rotate around axis, disposed in plane of substrate, inertial masses 28 and 30 begin to oscillate in plane being perpendicular to substrate due to torsion of torsion beam 29. When semiconductor substrate begins to rotate around axis, disposed in perpendicular to substrate, inertial masses begin to oscillate along plane of substrate due to curve of flexible beams 18-21 made of carbon nano-tubes. Value of angular speed can be measured around axis X disposed within plane of substrate, and of axis Z, disposed in perpendicular to plane of gyro's substrate.

EFFECT: improved precision of measurement.

2 dwg