INTEGRAL MICRO-MECHANICAL GYROSCOPE Russian patent published in 2007 - IPC G01P15/08 

FIELD: the invention refers to the field of measuring technique and micro-system technique and more concretely to the integral measuring elements of the value of angular speed.

SUBSTANCE: the essence of the invention is that in an integral micro-mechanical gyroscope there are two additional unmovable electrodes of capacitive converters of displacements fulfilled out of semiconductor material and located directly on the substrate, one interior frame fulfilled out of semiconductor material and located with a clearance relatively to the semiconductor substrate, two additional torsion bars fulfilled out of semiconductor material and located with a clearance relatively to the semiconductor substrate. At that the inertial mass is located in the interior frame and connected with it with the aid of two additional torsion bars forming flat condensers with two additional unmovable electrodes of capacitive converters of displacements. The technical result of the invention is possibility of measuring the value of angular speed around axles X located in the plate of the substrate and Z located perpendicularly to the plane of the substrate of the gyroscope.

EFFECT: provides possibility to measure the value on angular speed.

2 dwg