FIELD: micro-structure devices including flexible members, namely electrodes movable one relative to other that may be used as meters of acceleration, temperature and pressure values.
SUBSTANCE: meter includes two electrodes arranged in vacuum one opposite to other and mutually spaced by distance d. At least one electrode is movable and it is made in the form of metal plated zone on elastic plate mounted on support. Both electrodes are flat and they have specific dimensions L1, L2 satisfying to relation h≪d<L1≤L2≪R where h - specific value of electrode roughness degree; R - curvature radius of electrode surface.
EFFECT: improved response, enlarged amplitude-frequency range, simplified design of emission meter.
6 cl, 5 dwg
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