FIELD: manufacturing technology.
SUBSTANCE: invention can be used in the creation and manufacturing of micromechanical devices containing elastic flexible deformable actuating elements by chemical etching method with the use of masks. Accelerometer sensing element manufacturing method is based on the sensitive elements volumetric structures formation by the group method by the step-by-step etching method of the monocrystalline silicon plates with orientation (100) or quartz glass with diameter of at least 100 mm, including liquid and ion-plasma etching.
EFFECT: enabling the increase in productivity due to the use of the group technological process and increase in the produced parts quality.
7 cl, 6 dwg
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