METHOD OF MEASURING QUANTUM EFFICIENCY AND DARK CURRENT OF PHOTOSENSITIVE CELLS OF INFRARED MATRIX PHOTODETECTORS Russian patent published in 2013 - IPC H01L31/00 G01J1/16 

FIELD: physics.

SUBSTANCE: invention relates to methods of measuring parameters of infrared matrix photodetectors operating in accumulation mode. The method of measuring quantum efficiency and dark current of photosensitive cells of matrix infrared photodetectors involves installing placing a photodetector at a given distance from the radiating surface of an extended black body, setting a first given radiant temperature of the black body and recording the value of signals of all photosensitive cells at zero accumulation time and a given accumulation time. A second radiant temperature of the black body is then set, said second radiant temperature being different from the first by a given value δT, and values of signals of all photosensitive cells are recorded at given accumulation time; values of quantum efficiency and dark currents of photosensitive cells are automatically calculated based on three measured arrays of signals.

EFFECT: enabling automation of the method of measuring quantum efficiency and dark current of a photodetector, enabling reduction of the time for measuring quantum efficiency and dark current of a photodetector, and enabling increase in reliability of measuring quantum efficiency and dark current of a photodetector.

2 cl, 3 tbl