FIELD: physics.
SUBSTANCE: method of making a solid-state image capturing device which includes a substrate, having a photoelectric conversion unit, and a waveguide assembled on the substrate, wherein the waveguide matches the photoelectric conversion unit and includes a core and cladding, the method comprising a first step and a second step, where at the first step and second step an element to be moulded into a core is formed in an opening in the cladding by high-density plasma-chemical vapour deposition, wherein at the second step the element to be moulded into a core is formed by high-density plasma-chemical vapour deposition under conditions where the ratio of radio-frequency power on the side of the back surface of the substrate to the radio-frequency power on the side of the front surface of the substrate is greater than the ratio at the first step.
EFFECT: high adhesion of the built-in element and avoiding deformation in the structure.
15 cl, 15 dwg
