OBTAINING TOPOGRAPHY OF OBJECTS HAVING ARBITRARY GEOMETRIC FORM Russian patent published in 2013 - IPC G01B11/24 G01B11/30 

Abstract RU 2502953 C2

FIELD: physics.

SUBSTANCE: method of positioning an object, the surface topography of which is obtained, on a sensor system having a set of motors for rotating the object around a motor axis perpendicular to an optical axis of the sensor system and for moving the object in X, Y and Z directions, the method comprising steps of: determining a motor axis position relative a reference position in a reference coordinate system; positioning the sensor system and/or object in a desired position and obtaining a relief map of an area in the field of view of the sensor system; calculating a normal representative of the topography of the relief map of the area; determining an angle difference between the normal and the optical axis of the sensor system and comparing the angle difference to a threshold angle to determine if the surface of the area is perpendicular to the optical axis of the sensor system; if the angle difference is greater than the threshold angle, calculating a set of repositioning parameters using the motor axis position for rotating the object to obtain a new difference angle less than said threshold angle; and moving said object to reposition said area in said field of view after said rotating has displaced said area.

EFFECT: improved quality of the topography of objects of an arbitrary shape owing to positioning thereof.

25 cl, 14 dwg

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RU 2 502 953 C2

Authors

Roberzh Danni

Bosham Alen

Dates

2013-12-27Published

2009-05-15Filed