FIELD: sensor technology and nanotechnology.
SUBSTANCE: invention relates to the field of sensor technology and nanotechnology and can be used to create a portable gas analysis device. A method is proposed for manufacturing a matrix of chemoresistive sensors with sensitive layers formed by electrophoretic deposition. Layers of TiO2, TiO2-CuOx, TiO2-CNT ZnO from suspensions based on isopropanol, acetone or mixtures thereof with nanoparticles in such a way that the gap between the interdigitated electrodes is filled.
EFFECT: providing the possibility of local formation of sensitive layers of sensors of complex composition on a single substrate using available nanopowders.
1 cl, 8 dwg
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