METHOD FOR FORMING A LiCoO FILM AND APPARATUS FOR IMPLEMENTATION THEREOF Russian patent published in 2022 - IPC C23C14/34 C23C14/08 H01M10/02 H01M10/04 

FIELD: chemical processes.

SUBSTANCE: invention relates to the field of technological equipment and technology for mass production, in particular, vacuum equipment and technology intended for forming a functional layer of a thin-film battery (cathode) with predetermined electrical, physical, and chemical properties, in particular, to a method for forming a LiCoO₂ film and an apparatus for implementation thereof. A layer of LiCoO₂ from a cobalt (Co) metal target in lithium (Li) vapours is applied to the substrate by the method of reactive magnetron sputtering in a vacuum chamber. Controlled supply of lithium vapours into the magnetron through a gas distributor connected to the working gas input and the lithium supply input is conducted. The carrier gas flow is therein supplied through a heated tank with lithium, heated to the melting point of lithium. The lithium vapour supply is adjusted by changing the carrier gas flow through the heated tank. The apparatus comprises a vacuum chamber, a magnetron with a cobalt metal target. Located on one side or along the perimeter of the magnetron is a gas distributor connected to the working gas input and through a tap and/or valve to a heated tank with lithium, connected to the carrier gas input. The gas distributor can be made hollow or labyrinth. The heated tank with lithium can be located inside or outside of the vacuum chamber.

EFFECT: invention provides for a radical reduction in the cost of mass production of thin-film solid-state accumulators (batteries), increase in the rate of deposition of the LiCoO₂ film, increase in the productivity of equipment.

3 cl, 2 dwg