METHOD TO MANUFACTURE MICROELECTROMECHANICAL KEY FOR PROTECTION OF INFORMATION-TELECOMMUNICATION EQUIPMENT OF SPACECRAFTS DURING ELECTROMAGNET START Russian patent published in 2014 - IPC B81C1/00 

FIELD: instrument making.

SUBSTANCE: in the method to produce a microelectromechanical key, being the basis of the system of protection of information-telecommunication equipment of spacecrafts during electromagnetic start with overloads from several thousands to tens of thousands of units of accelerations of free body fall, a sensitive block is formed, made of a beam and supports, adjoining under action of acceleration to the substrate with the help of contact elements, forming a signal at the same time, which indicates the threshold of the acceleration value, by which they decide on overload of equipment, conducting paths and contact sites are formed by etching via a mask on a flat semiconductor substrate, using a system of vanadium-aluminium metals, and the sensitive block is produced with the help of a double-layer system of iron-nickel metals, which deposit each other in a single process cycle of thermal evaporation in vacuum, which are then etched via the mask in the aqueous solution of hydrochloric acid to produce the specified shape of the sensitive block in one cycle.

EFFECT: higher manufacturability, reduced labour intensiveness of the method to produce groups of microelectromechanical keys, higher reliability of actuation when threshold values of accelerations are achieved, during electromagnetoelectric start of unmanned small spacecrafts.

5 cl, 3 dwg, 2 tbl